Apparatus for accurately registering a first member and a second member in an interdependent relationship

ABSTRACT

Apparatus for accurately registering a first member in an interdependent relationship to a second member including prealigned registration members selectively mounted on the second member and having a first elongated member which defines a primary registration point, a second elongated member which defines a different secondary registration point, which together define a line of rotation, a third elongated member which defines a tertiary registration point located at a point other than on the line of rotation wherein each of the elongated members are positioned in a predetermined pattern and reference registration members mounted on the first member having a first receiving member which defines a primary reference point which receives and engages the first elongated member superimposing the primary registration point on the primary reference point, a second receiving member defining a reference line segment which extends in a preselected direction wherein the second receiving member receives and engages the second elongated member superimposing the second registration point on the reference line to establish a secondary reference point thereon, and a third receiving member defining a reference plane segment which lies in a predetermined direction wherein the third receiving member receives and engages the third elongated member superimposing the third registration point onto the reference plane segment to establish a tertiary reference point and wherein the elongated members co-act interdependently with the receiving members to restrain lineal and rotational movement between the first member and the second member loaded against each other without redundancy of constraint is shown. A method for accurately registering a first member to a second member is also shown.

This is a division of application Ser. No. 304,066, filed Sept. 21,1981, now U.S. Pat. No. 4,372,248.

BACKGROUND OF THE INVENTION

1. Field of the Invention

This invention relates to means for accurately registering a firstmember an interdependent relationship to a second member and moreparticularly to apparatus for accurately registering a reference memberin a co-acting interdependent relationship to one or more of a pluralityof moveable members. The apparatus disclosed herein utilizes athree-point registration system utilizing a cone, vee groove and flatplanar surface which cooperate with alignment pins having sphericalshape ends to form a highly accurate mechanical registration means. Thisinvention has particular utility in a vacuum thin film vapor depositionsystem for accurately registering a substrate to a series of depositionmakes in a vapor deposition process.

2. Description of the Prior Art

The use of alignment pins and alignment pin receiving means are wellknown in the art as a means for registering a first member to a secondmember. Specifically, the use of a three-element pin and aperturealignment system for aligning a first member to a second member isdisclosed in U.S. Pat. Nos. 3,694,919 and 3,510,947.

The apparatus disclosed in U.S. Pat. No. 3,694,919 is a dentalarticulator which utilizes a pair of simulated socket members and a restpin as a means to register an upper assembly to a lower assembly. Thesimulated socket members each include a spherical stylus and a simulatedsocket which cooperates with the stylus to provide two pivot pointswhich are adapted to provide a common axis about which a frame can berotated. The rest pin is adapted to come into contact with a rest blockon the lower assembly which provides a third point of support. The upperassembly is removable from the lower assembly by separating the rest pinfrom the block and the upper assembly from the two spherical shapedstylus members such that the simulated socket members can be removedfrom contact therewith which makes the upper assembly easily separablefrom the lower assembly which supports the two spherical shaped stylusmembers and the rest block. The upper assembly can be positioned backinto registration with the lower assembly by placing the simulatedsocket members back onto the spherical shaped stylus members and thenrotating the upper assembly relative to the common axis defined by theline of rotation extending between the centers of the spherical shapedstylus members until the rest pin on the upper assembly engages the restblock.

Another known three-element registration system for registering a firstmember in operative relationship to a second member is disclosed in U.S.Pat. No. 3,510,947 which is in the form of an interchangeable dentalarticulator. Stud members having alignment pins are cast into a basemember in a predetermined pattern such that the alignment pins extendoutwardly from the upper surface of the base member. The stud memberscomprise a collar of substantially cylindrical configuration having thealignment pins in the form of a cone shaped member defining an invertedfrusto conical member extending coaxially therefrom positioned on oneside and a similar shaped element extending from the other side thereofand into the base member. The second member, which may be a dentalmodel, has three alignment pin and collar receiving holes formed in thebottom thereof in substantially the same pattern as the alignment pinspositioned in the base member. An elastic or resilient, annular shapedmember having an aperture extending through the center thereof is castinto the material forming the second member. The dental model can bepositioned in operative relationship to the base member by positioningthe apertures containing the annular shaped member over the alignmentpin extending from the uppersurface of the base member and the dentalmodel can be removably affixed to the base member by urging the dentalmodel into engagement with the base member driving the alignment pininto engagement with and deforming the annular shaped member so that thecollar can pass therethrough to maintain the dental model in positionrelative to the base. The dental model can be removed from the base byapplying sufficient separation force between the dental model and thebase to cause distortion of the annular member and to pull the columnmember through and further deforming the annular shaped member to permitseparation thereof.

The use of a three-element apparatus for registering an opticaldiffraction grating member to a support for accurate mechanicalregistration as required is utilized in a scanning monochrometer knownas the ARL-FICA Quantoscan which is offered for sale and sold by AppliedResearch Laboratories. The Quantoscan scanning monochrometer utilizes adiffraction grating which must be positioned in a vertical plane andlocated very accurately relative to two reflective members and two slitsto provide a precise defraction pattern relative to a light source anddetector. In using the Quantoscan scanning monochrometer, it issometimes necessary to remove the grating member in order to clean thesame or to otherwise maintain the apparatus. It is essential that thegrating member be accurately positioned back onto its support so thatrepeatable readings can be obtained in a monochrometer. In order toobtain the accurate registration of the grating to the support, athree-element registration system is utilized which is formed of threeball elements which cooperate with a cone, vee groove and flat. Thegrating member contained alignment balls are adapted to cooperate withthe cone, vee groove and flat which is located on the grating support. Aspring support was connected between the grating member and a support toprovide a positive clamping force onto the grating to urge the alignmentballs into intimate engagement with the cone, vee groove and flatsupports and to counteract the gravitational force acting on thevertically supported grating. Accurate alignment between the grating andother optical members was obtained by adjustment of the grating supportcarrying the cone, vee groove and planar member relative to the framesupporting the other optical members. Once the appropriate adjustmentwas obtained, the grating member could be removed by releasing theclamping force therefrom and could be cleaned or otherwise maintained.The grating member was capable of being reinstalled in a reproducibleregistration to the base by positioning the balls back into engagementwith the cone, vee groove and flat surface and reattaching the springmember thereto.

Each of the above described prior art devices perform the function ofengagement and registration of a first member with a second member inambient atmosphere.

The use of a two-point support system for a magnetic head in a magneticdisk recording system is disclosed in U.S. Pat. No. 3,774,183. Thetwo-point support system permits the head to exhibit movement in theform of pitch and roll only, while prohibiting yaw, as the head fliesover the surface of a magnetic recording disk.

In the two-point support system, a pivot bar attached to a transducerhas two apertures, one of which is generally circular in crossectionalshape having inwardly sloping sidewalls to define a conical shapedsurface and the other aperture which is generally elliptical incross-sectional shape having inwardly sloping walls forming a conicalshaped surface. Two pin members attached to compliant springs, eachhaving a spherical end which is positioned one each in each one of theapertures, enables the transducer to roll and pivot but restrictslateral movement and yaw of the transducer.

It is also known in the art to utilize apparatus for registering adeposition mask to a substrate for producing thin film magnetictransducer using a vapor deposition process. One such technique isdisclosed in U.S. Pat. No. 3,867,868 to Lazzari.

In fabrication of a thin film transducer having pole piece layers andone or more winding layers and insulation layers, any one of severaltechniques can be used in an attempt to precisely control the width,depth and registration of the various layers relative to the priordeposited and post deposited layers. The Lazzari apparatus utilized infabricating such thin film transducers relies on the use of a rollingmask-carriage assembly positioned by a lead screw which functionallyattempted to index and accurately position a specific deposition maskpattern relative to a substrate held by a pivoting arm.

In known vapor deposition processes, the use of pins, dowels orextending members in cooperation with apertures, which may either becylindrical or elliptical in shaped, result in a high degree of frictionbeing developed between the dowel pins and the receiving apertures whichcooperate with the dowel pins. The high degree of friction is due to thefact that lubricants and surface contaminates are removed from the dowelpins and the inner walls defining the aperture. The contaminates includeadsorbed gasses, lubricating contaminants, and the like which areremoved from the surfaces of the engaging elements located in thechamber of the vacuum deposition apparatus by the pumping of the vacuumand the use of high temperatures typical of deposition processes.

In such alignment devices, clearance must be provided in order to permitengagement and disengagement of the apertures and cooperating alignmentdowels or pins on members to be aligned. The amount of clearancedirectly affects the accuracy of registration of the registered members.Also, binding or siezing of the members can be experienced duringengagement or disengagement of the apertures and cooperating alignmentdowels or pins due to tilting or other angular misalignment between themembers and due to discrepancies in center line distance between variousinteracting elements.

In a vacuum deposition process, it is known in the art that thecoefficient of friction, both dynamic coefficient of friction and statecoefficient of friction, are extremely high compared to ambientatmosphere conditions. This is due primarily to the high degree ofatomic adhesion or binding which occurs between the surface of thecomponents due to removal of a substantial portion of adsorbed gases andsurface contamination.

SUMMARY OF THE INVENTION

This invention relates to a new, novel and unique means for accuratelyregistering a first member in an interdependent relationship to a secondmember. In the accurate registration means of the present invention,prealigned registration means are operatively coupled to a secondmember. The prealigned registration means including three elongatedmeans which are adapted to be positioned in a spaced relationship toeach other and in a predetermined pattern on and extending generally inthe same direction from the second member. One of the three elongatedmeans is adapted to be selectively mounted on the second member and hasa portion thereof defining a primary registration point. A second one ofthe three elongated means is adapted to be selectively mounted on thesecond member and has a portion thereof defining a secondaryregistration point which is other than said primary registration point.The primary registration point and the secondary registration pointdefine a line of rotation. A third of the three elongated means isadapted to be selectively mounted on the second member and has a portionthereof defining a tertiary registration point which is located at apoint other than on the line of rotation. Reference registration meansare adapted to be operatively coupled to the first member which is to beaccurately registered in an interdependent relationship to the secondmember. The reference registration means include three elongated meansreceiving means which are adapted to be positioned on and fixedlyattached to the first member in substantially the predetermined pattern.A selected one of the three elongated means receiving means defines aprimary reference point having three mutually orthogonal axes whichdefine six independent degrees of freedom. The selected one of the threeelongated means receiving means is adapted to receive and engage the oneof the elongated means superimposing the primary registration point ontothe primary reference point to establish a rotatable supporttherebetween which fixes lineal movement in all three mutuallyorthogonal axes between the primary registration point and the primaryreference point, which is in engagement therewith, and which permitsrotational movements in all three rotational degrees of freedom aboutthe primary reference point. A selected second one of the threeelongated means receiving means defines a reference line segment havinga predetermined length and which extends in a direction other than in adirection which is perpendicular to a line extending radially from theprimary reference point to any point located on the reference linesegment. The selected second one of the three elongated means receivingmeans is adapted to receive and engage the second one of the elongatedmeans superimposing the secondary registration point onto the referenceline segment to establish a secondary reference point thereon whichdefines an axis of rotation between the primary reference point and thesecondary reference point. The superimposing of the secondaryregistration point onto the reference line segment fixes lineal movementthereof in a plane perpendicular to the reference line segment at thesecondary reference point, permits lineal movement along the referenceline segment and permits rotational movements in all three rotationaldegrees of freedom at the secondary reference point. A selected thirdone of the three elongated means receiving means defines a referenceplane segment having a predetermined extent and which lies in anorientation other than perpendicular to a line intersecting with andperpendicular to the axis of rotation and passing through any point onthe reference plane segment. The selected third one of the thirdelongated means receiving means is adapted to receive and engage thethird of the three elongated means superimposing the third registrationpoint onto the reference plane segment to establish a tertiary referencepoint which fixes lineal movements thereof along an axis perpendicularto the reference plane segment and permits lineal movements along thereference plane segment and permits rotational movements in all threerotational degrees of freedom about the tertiary reference point. Thereference registration means is adapted to receive and engage theprealigned registration means when the first member and the secondmember are loaded against each other enabling the elongated means toco-act interdependently with the elongated means receiving means torestrain lineal and rotational movements between the first member andthe second member without redundancy of constraint in any of the sixdegrees of freedom to accurately register the first member relative tothe second member.

As stated hereinbefore, the prior art mask-carriage assemblies,attempted to simultaneously index and accurately register one or moredeposition masks to a substrate in a multistep deposition processrequiring accurate registration between prior deposited and postdeposited layers of thin film material. The inability of themask-carriage assembly to accurately register a deposition mask or aselected one of a plurality of deposition masks to a substrate resultedin misregistration of the prior deposited and post deposited layers on asubstrate requiring multiple thin film layers of material to bedeposited thereon in a predetermined sequence in order to form a desiredcomponent.

In the apparatus disclosed in U.S. Pat. No. 3,694,919, the simulatedsocket members cannot be adjusted in the direction extending from thefront to the rear of the support assembly to achieve full alignment. Inaddition, the two simulated socket members both appear to attempt toposition the upper assembly relative to the lower assembly in adirection along the common axis through the balls resulting in an"overconstrained" support; that is, two different elements are inconflict in attempting to fix the location of the upper assembly in thedirection described. Further, the spacing adjustment, or adjustment in adirection parallel to the rest pin, can be made only at the rest pin andthe spacing is fixed at the socket members. If a precise registrationbetween the upper assembly and the lower assembly is desired, the fitbetween the spherical stylus and socket would have to be very tight.However, the sockets do not appear to be tight, as discussed below, andare essentially custom fabricated for each patient. Further, in order tominimize lateral displacement along the common axis, a rotating pivotpoint joint is provided which is either a further overconstraint alongthe common axis through the balls which intercepts the channel utilizedfor the rotating pivot point joint or evidence that the fit of the pivotjoints are not precise and are thereby incapable of accuratelyregistering the two assemblies. Further, the support apparatus includesthe ability to have the simulated socket members formed into slots inorder to simulate jaw protrusions between dental models located on theupper assembly and lower assembly and such ability to simulate jawprotrusions is further evidence that the simulated socket members couldbe positioned in one of several locations resulting in the upperassembly having a range of positions relative to the lower assembly.Further, the rotating pivot point joint is required to insure that thedesired registration between the upper assembly and lower assembly ismaintained.

Other known prior art registration apparatus having deformable resilientmembers and the like are used to form a removable registration andholding means. In such known prior art apparatus, it is not possible toobtain a high degree of accuracy of registration which is unique andreproduceable due to the hysteresis, compliance and frictioncharacteristics of the resilient members. Further, errors in dimensionalaccuracies occur due to inexact placement of the collars within a firstmember and the location of apertures having the resilient annular shapedmembers in a second member. An attempt is made to offset these errors bythe ability of the deformable resilient members to yield and compensatefor the variances in dimensional accuracies.

Another disadvantage of the known prior art devices is that most highprecision devices are used at or near ambient room temperature. However,in a vacuum deposition process, the substrate, deposition masks, supportapparatus and the like are subject to variable high temperature rangeswhich results in the parts experiencing thermal expansion, the magnitudeof which is determined by the thermal coefficient of expansion of theappropriate materials and their changes in temperature.

In the known apparatus for registering a first member to a secondmember, such apparatus do not adequately compensate for thermalexpansion and contraction of materials while attempting to maintain ahigh degree of registration between the first member and a secondmember. In addition, thermal expansions and contractions in suchapparatus, which is not adequately compensated, can result in binding,seizing and jamming of the members.

Another disadvantage of the known prior art registration means andapparatus for registering a first member to a second member is thatslight variations in geometrical dimensions between a plurality ofsecond members each of which may have elongated means extendingtherefrom, such as for example, alignment pins, sockets, collars,dowels, or the like, likewise result in binding, seizing or jamming. Ifthe dimension tolerances are relaxed to provide adequate clearances toovercome the same, precise accurate registration cannot be achieved.

The present invention overcomes several disadvantages of the prior artapparatus and method. In the preferred embodiment, the means foraccurately registering a first member in operative relationship to thesecond member is adapted for use for aligning a substrate to astabilized mask in a vacuum deposition process.

Thus, one advantage of the present invention is that a means forregistering a first member to a second member can be utilized which willprovide accurate registration of a first member to a second member in ahigh temperature environment and in an atmosphere which is less thanatmosphere pressure such as the vacuum of a vacuum deposition process.

Another advantage of the present invention is that the apparatus foraccurately registering a mask to a substrate can accurately establishand control the mask to substrate spacing.

Another advantage of the present invention is that the referenceregistration means can comprise a cone, vee groove and flat planarsurface which is adapted to cooperate with alignment pins, havingspherical shaped ends to permit reliable engagement and disengagement ofa first member to a second member eliminating the possibility ofbinding, seizing and jamming therebetween to register the first memberto the second member with zero clearance between the registration means.

A still yet further advantage of the present invention is that the meansfor registering a first member to a second member permits non-redundantindexing by providing a critically constrained system wherein accurateregistration is obtained independent of expansion due to thermalcoefficients of expansion and the like thereby avoiding binding, siezingand jamming of the registering means.

A still yet further advantage of the present invention is that therelative angle of the cone and vee groove can be selected to minimizethe effect of friction developed by the co-action and sliding of thereference registration means and prealigned registration means relativeto each other during the engagement and self alignment.

A yet still further advantage of the present invention is that thematerial selected for the cone, vee groove, flat planar surface andalignment pin can be selected for use in a high vacuum, high temperatureenvironment to minimize friction at a high temperature and vacuumnormally associated with a vacuum deposition process.

A still yet further advantage of the present invention is a method foraccurate registration provides a sequence by which the cone, vee grooveand flat planar surface are engaged with the alignment pins to minimizethe effects of sliding friction due to the co-action therebetween.

A yet still further advantage of the present invention is that thereference registration means in terms of a cone, a vee groove and flatplanar surface can be maintained in a relatively clean condition toprevent debris from building up on the surface thereof by the edge ofthe cone defining a shield member and by use shield members around theperiphery of the vee groove and flat. The first member having thereference registration means and the shield member is positionedvertically relative to the second member with the openings of the cone,vee groove and shield members positioned downward such that gravitycauses debris to fall out. When the second member is positioned relativeto the first member, a small opening or labyrinth exists through whichdebris is restricted from migrating thereby reducing the buildup of dustor other contaminants on the surfaces of the reference registrationmembers which would otherwise affect the alignment pins and theappropriate reference registration means surface.

A still yet further advantage of the present invention is that by theuse of a prealigned registration means and reference registration means,alignment pins which form part of the prealigned registration meanslocated on a second member can be rotatably mounted within the secondmember through eccentric means to permit adjustments of the pins in afirst and/or second direction in a selected plane depending on theselected alignment pin to be matched to a selected referenceregistration means.

A still yet further advantage of the present invention is that thesecond member is initially indexed by an externally activated indexingmechanism into a position relative to the first member and the firstmember self-aligns and registers upon engagement with the second memberand the self-aligning action results in the first member and secondmember co-acting interdependently with each other to inherently achievea final, repeatable precise registration independent of the degree ofaccuracy in indexing the second member into position relative to thefirst member.

A still yet further advantage of the present invention is that one ormore of the alignment pins together with its appropriate adjusting meanscan be adjusted to precisely position the associated alignment pinrelative to a pattern located on a stabilized deposition mask such thata plurality of second members having adjustable alignment pins can bepreregistered to a first member having the reference registrationmembers such that accurate registration of a first member to any one ofthe second members will result in accurate registration therebetween.

A still yet further advantage of the present invention is that when afirst member is accurately registered to a second member that the firstmember can be easily separated from the second member by a separationforce which must only overcome gravity and when the first member is soseparated another second member can be indexed into approximately thesame position as the prior second member and the first member can thenbe accurately registered to the other second member having prealignedregistration means located on the second member in substantially thesame pattern as the original second member.

BRIEF DESCRIPTION OF THE DRAWING

The foregoing and other advantages and features of this invention willbecome apparent from the following description of the preferredembodiment when considered together with the illustrations andaccompanying drawings which include the following figures:

FIG. 1 is a front plan view, partially in cross section, showing the useof the accurate registration means for aligning a gantry means having asubstrate relative to a stabilized mask assembly having prealignedregistration members located thereon;

FIG. 2 is an orthographic projection of a mask supporting apparatuswhich is partially pictorial showing a stabilized mask assembly as asecond member having a plurality of prealigned registration membersmounted thereon and a diagrammatic representation of referenceregistration members which are adapted to be positioned on the firstmember;

FIG. 3 is a top plan view of a mask supporting apparatus havingprealigned registration members including adjusting means and alignmentpins located on the periphery thereof;

FIG. 4 is a sectional view taken along section lines 4--4 of FIG. 3;

FIG. 5 is a right-end plan view of a mask supporting apparatus of FIG.3;

FIG. 6 is an partial view partially in cross section showing therelationship between an eccentric bushing and an elongated member whichincludes an alignment pin being supported thereby;

FIG. 7 is a bottom plan view of the elongated member;

FIG. 8 is a sectional view of an elongated member taken along sectionlines 8--8 of FIG. 7 showing an alignment pin and collar at one endthereof and a shank at the other end thereof;

FIG. 9 is a bottom plan view of the eccentric bushing;

FIGS. 10 through 12, inclusive, are bottom plan views of an eccentricbushing having an aperture extending axially therethrough with the axisthereof offset from the center line of the eccentric bushing and theshank of the elongated member located in the aperture and showingvarious rotational positions therebetween and the position of analignment pin at such positions;

FIG. 13 is a sectional view of the bushing of FIG. 9 taken along sectionlines 13--13 of FIG. 9;

FIG. 14 is a sectional view of eccentric bushing taken along sectionlines 14--14 of FIG. 9;

FIG. 15 is a bottom plan view of a gantry means including a substrate;

FIG. 16 is a right-end plan view of the gantry means of FIG. 15;

FIG. 17 is a sectional view taken along section lines 17--17 of FIG. 15;

FIGS. 18, 19 and 20 are partial views partially in cross section showingthe constructions of a flat planar surface, a vee groove and a cone,inclusively;

FIG. 21 is a pictorial representation of a prealigned registration meanswhich are operatively mounted onto a second member which are disengagedfrom reference registration means which are operatively mounted onto afirst member;

FIGS. 22, 23, and 24 illustrate pictorally the sequence in which a cone,vee groove and flat planar surface can be loaded against and co-actinterdependently with the associated alignment pins;

FIG. 25 is a diagrammatical representation of the degrees of adjustmentand relative motion between eccentric bushing and an elongated memberincluding its alignment pin and movement thereof relative to a secondmember;

FIGS. 26(a) through 26(e) inclusive, are pictorial representations ofthe various adjustments which can be made between the eccentric bushingand alignment pin to obtain the desired location of the axis of analignment pin through a selected plane, FIG. 26(f) shows adjustment ofthe alignment pin without the use of an eccentric bushing and FIG. 26(g)shows the alignment action of a second member due to the adjustmentshown in FIG. 26(f).

FIG. 27 is a bottom plan view of a different embodiment of an eccentricbushing having an aperture extending axially therethrough with the axisthereof located on a line which is offset from the center line of theeccentric bushing at a 45° angle relative to the X-Y adjustmentdirections and an elongated member having a collar, shank and aneccentric alignment pin mounted thereon.

DESCRIPTION OF THE PREFERRED EMBODIMENT

FIG. 1 illustrates the use of the means for accurately registering afirst member in an interdependent relationship to a second member foruse in vacuum deposition process. Specifically, a mask supportingapparatus shown generally by arrow 30, includes a dimensionallystabilized mask supporting frame 32 which includes a relatively thin,substantially planar mask 40. The mask supporting apparatus 30 includesprealigned registration means, shown generally by arrow 42, whichincludes an adjusting means 44, which is adapted to support an elongatedmember 46, having one end thereof which terminates in an alignment pin48 and a shank 50.

The mask supporting apparatus 30 is positioned within a carriageassembly 60 by means of a mask support housing 62.

A shielding means 66 extends through an aperture 68 formed in thecarriage assembly 60 which provides a passageway 70 which permits vapormaterial shown by arrow 72 eminating from a source of vapor material 74to pass therethrough. The vapor material 72 passing through passageway70 passes through the apertures 120 in the substantially planar mask 40and onto a substrate 80 which is supported by gantry means showngenerally by arrow 82. The gantry means 82 is part of a gantry assemblyshown by arrow 84. Means, shown by arm 86 is provided to move the gantryassembly 84 including gantry means 82 and substrate 80 relative to thesubstantially planar mask 40 which, in the preferred embodiment, is avacuum deposition mask.

The gantry means 82 includes reference registration means showngenerally as 90 which are mounted thereon and which are adapted toco-act with the prealigned registration means 42.

In operation, the carriage assembly 60 supports the mask 40 relative toa working station located above and in a working relationship with thesource 74. When the gantry means 82 and the mask supporting apparatus 30are loaded against each other, the reference registration means 90co-acts interdependently with the pre-aligned registration means 42 toobtain accurate registration therebetween.

The term "interdependently" when used herein means that the first memberand second member are adapted to be loaded against each other and, whenengaged, the reference registration means and prealigned registrationmeans are mutually dependent on each other to co-act such that the firstand second members actually move relative to each other as necessary ina predetermined manner and sequence and ultimately accurately registerin a selected, predictable and repeatable position relative to eachother.

FIG. 2 illustrates a mask supporting apparatus which includes astabilized mask assembly 100 which comprises a dimensionally stabilizedmask supporting frame 32 and the relatively thin, substantially planarmask 40. The dimensionally stabilized mask supporting frame 32 has anopening 106 (which is shown in FIG. 4) extending through the centerthereof. Means including a circumferentially extending surface, which inthe preferred embodiment is a raised ridge 110. The raised ridge 110extends around the periphery of the opening 106 and on one side of thedimensionally stabilized mask supporting frame 32. The dimensionallystabilized mask supporting frame 32 includes means for defining a frameflange 112 which supports the circumferentially extending surface orraised ridge 110.

The relatively thin, substantially planar mask 40 is formed of amaterial having a predetermined yield strength and a selectedgeometrical shape and dimension. The mask 40 is positioned adjacent theopening 106 and contiguous the circumferentially extending surface orraised ridge 110. The mask 40 has a plurality of apertures 120 extendingtherethrough and arranged in a predetermined array defining a thin filmpattern illustrated by grouping 122.

A means for rigidly affixing the periphery of the mask 40 to thecircumferentially extending surface or raised ridge 110 applies a radialtension to the mask 40. In the preferred embodiment, the means forrigidly affixing the periphery of the mask 40 to the raised ridge 110 isa weld. The radial tension applied to the mask has a magnitude whichestablishes a stress on the mask 40 during use thereof which is lessthan the predetermined yield strength of the mask when the mask is usedover a temperature range of a deposition process including specifically,the operating temperatures of a deposition environment. Also, the radialtension is adapted to maintain a stress of sufficient magnitude to keepthe mask 40 under tension independent of variations in radial tensiondue to the thermal expansion characteristics of the mask 40 todimensionally stabilize the thin film pattern 122 at the operatingtemperature of a deposition environment.

In the preferred embodiment as illustrated in FIG. 2, three prealignedregistration means 130, 132 and 134 are shown. In the preferredembodiment, the three prealigned registration means are mounted on theframe flange 112 through support apertures 176 (shown in FIG. 6) formedinto the dimensionally stabilized mask supporting frame 32. In thedescription set forth herein, the term prealigned registration means andreference registration means include elements which function to alignthe first and second members as described herein. Structurally, the"means" are "members" having specific sizes, shapes and dimensions toaccomplish the functions. Accordingly, the terms "prealignedregistration means" and "prealigned registration members" are usedinterchangeably and, likewise, the terms "reference registration means"and "reference registration members" are used interchangeably.

In the preferred embodiment, each of the prealigned registration members130, 132 and 134 includes an eccentric bushing and an elongated memberwhich has an alignment pin, collar and shank. This is shown in greaterdetail in FIGS. 3 to 6.

In FIG. 2, the prealigned registration members 130, 132 and 134 includealignment pins 142, 144 and 146 which are a part of elongated members148, 149 and 150, respectively.

Reference registration means, shown generally by arrows 90, are adaptedto be operatively coupled to a first member, such as for example thegantry means 82 of FIG. 1, which is to be accurately registered in aninterdependent relationship with a second member such as for example,the stabilizing mask assembly 100 of FIG. 2. The reference registrationmeans, shown by arrows 90, include three elongated means receiving meanswhich are adapted to be positioned on and fixedly attached to the firstmember in substantially the same predetermined pattern as the prealignedregistration means 130, 132 and 134 are mounted on the second member. Inthe preferred embodiment, the three elongated means receiving means area cone 152, a vee groove 154, and a flat planar surface 156.

FIGS. 3, 4, 5 and 6, show in detail the mounting of the prealignedregistration members 130, 132 and 134 within the flange 112 of thedimensionally stabilized mask supporting frame 32. Each of the members130, 132 and 134 include an elongated member 148, 149 and 150, having analignment pin 142, 144 and 146, respectively, extending therefrom. Asillustrated in FIG. 5, the elongated members 148, 149 and 150 include ashank 166, 168 and 170, respectively. The elongated members 148, 149 and150 are supported within eccentric bushings shown as 160, 162 and 164,respectively.

FIGS. 7 and 8 show in detail the construction of an elongated member 148which is typical. The elongated member 148 includes a collar 172 havinga shank 166 extending from one side thereof. The shank 166 has aselected diameter to enable the same to be rotatably positioned in theaperture 174 of eccentric bushing 160 shown in FIG. 6. The end or tip ofthe shank 166 terminates in a threaded end 190 which is adaptable toreceive a nut, such as nut 184 shown in FIG. 6. The surface of thecollar 172 positioned adjacent the shank 166 is beveled or ground asshown by groove 192, to form a discrete clamping surface 194. In theembodiment illustrated in FIGS. 7 and 8, the axis of the shank 166 iscoaxially aligned with the axis of collar 172.

Extending from the other side of collar 172 is an alignment pin 142which terminates in a spherical end. The diameter of the alignment pin142 is shown to be less than that of the shank 166. The axis of thealignment pin 142 is offset relative to the coaxially aligned axes ofthe collar 172 and shank 166.

Referring to FIGS. 9 through 14, inclusive, an eccentric bushing 160 hasan aperture 174 extending therethrough. The aperture 174 is off centerrelative to the axis of the eccentric bushing 160 and is parallelthereto as shown in FIG. 14. The shank 166 of elongated member 148 isrotatably positioned in the aperture 174 of the eccentric bushing 160.The axial length of the shank 166, in the preferred embodiment, hassufficient length to extend through the eccentric bushing 160, such thata spring washer 182, shown in FIG. 6, can be positioned thereon and thethreaded end 190 of the shank 166 is adapted to receive a nut 184. Ashim 180 can be positioned under the collar 172 such that it is locatedbetween the collar 172 and the frame flange 112 to provide a tightclamping action therebetween. By use of a clamping surface 194, shown inFIGS. 7 and 8, which is formed around the periphery of the collar 172 onthe side thereof towards the shank 166, a large frictional component offorce is established which holds the elongated member 148 in positionafter it is adjusted to a predetermined position as describedhereinafter.

In FIGS. 10 through 12, inclusive, the aperture 174 has the axis thereofoffset above the center line of the axis of the eccentric bushing 160.

FIGS. 13 and 14 show the eccentric bushing 160 which terminates in aboss 196 having two flat surfaces thereon which is adapted to receive anadjusting tool.

FIGS. 10, 11 and 12 illustrate an elongated member 148 mounted into thebushing 160 such that the shank 166 of the elongated member 148 isrotatably mounted in the aperture 174 of bushing 160. The collar 172 isspaced from the bushing 160 by the combination of the frame flange 112and shim 180 as shown in FIG. 6. As illustrated in FIG. 6, the thicknessof the shim 180 can be selected of a thickness to adjust the spacingbetween the first member and second member. In addition, FIG. 6illustrates an important relationship between the elongated member 148and the bushing 160. The end of the elongated member 148 having thealignment pin 142 is held in position by a clamping force or frictionforce developed between the collar 172 being urged against the shim 180which, in turn, is urged against the frame flange 112. The other end ofthe elongated member 148 having the shank 166 creates the clamping forceby the nut 184 and spring washer 182, which spring washer is in turnurged against the opposite surface of the frame flange 112 through boss196. One effect of this clamping force is to prevent the elongatedmember 148 from rotating when the bushing 160 is rotated whileconcurrently permitting lateral movement of the elongated member in an"X", "Y", or "X" and "Y" direction for adjustment purposes. Thedescription of FIGS. 10, 11, 12, 25 and 26 hereinafter are based on thisunderstanding.

In FIG. 10, the center line of alignment pin 142 is positioned to beoffset above the center line of the aperture 174. In the relationshipbetween the bushing 160, the shank 166 and alignment pin 142, as shownin FIG. 10, a small rotation of the bushing 160 or the shank 166, orboth, produces a displacement of the alignment pin 142 in predominantlythe "X" direction, although a very small or minimal displacement willinherently occur in the "Y" direction.

FIG. 11 illustrates that the center line of the alignment pin 142 ispositioned coaxially on the center line of the bushing 160 and off ofthe center line of aperture 174. In the relationship shown in FIG. 11, asmall rotation of the bushing 160 or the shank 166 or a small rotationof both in opposite directions produces a displacement of the alignmentpin 142 in predominantly the "X" direction, although a very small orminimal displacement will inherently occur in the "Y" direction.

FIG. 12 illustrates that the center line of the aperture 174 is offsetabove the center line of the bushing 160 and the alignment pin 142 isoffset to the right of the common center line of the aperture 174 andshank 166. A small rotation of only the bushing 160 displaces thealignment pin 142 in predominantly an "X" direction. A small rotation ofonly the shank 166 only displaces the alignment pin 142 in apredominantly "Y" direction.

Thus, selective adjustment of the bushing 160 and/or shank 166 canprovide a selected displacement of the alignment pin 142 along the "X","Y" or "X" and "Y" axes.

FIGS. 13 and 14 illustrate the details of construction of the eccentricbushing 160 to show the offset between the axis 198 of the bushing 160and the center line 200 of the aperture 174.

The eccentric bushings illustrated in FIGS. 9 through 12, inclusive, aredeemed to be an adjusting means which rotatably movably supports one ofa selected number of elongated members for adjustment in one or twodirections in a selected plane. As illustrated in FIG. 12, the alignmentpin 142 can be adjusted independently of the position of the eccentricbushing 160. Separate movements of the eccentric bushing 160 and of theshank 166 provide the ability to move the alignment pin 142 in both an"X" and "Y" direction. FIGS. 10 and 11 illustrate the ability to adjustthe alignment pin 142 in a predominately "X" direction only.

FIGS. 15 and 16 illustrate a gantry means which is adapted to support asubstrate 80. The gantry means is illustrated generally as arrow 82 inFIG. 1. In the preferred embodiment, the gantry means includes asubstrate holding means 210 for supporting a substrate 80 in apredetermined relationship to the source. The use of the gantry means inan assembled apparatus is illustrated in FIG. 1 and the position of thesubstrate 80 of FIG. 1 relative to the source of vapor material 74 isillustrated therein.

The gantry means includes reference registration members 230, 232 and234. The reference registration members 230, 232 and 234 are located insubstantially the same predetermined relationship on the flange 212 ofthe substrate holding means 210 and are adapted to co-act with theprealigned registration members located on the dimensionally stabilizedmask supporting frame 32 illustrated in FIG. 2. In use, the referenceregistration members 230, 232 and 234 are adapted to co-act with theprealigned registration members 130, 132 and 134 illustrated in FIG. 2,for accurately registering a substrate 80 in a precise position relativeto the mask supported by the dimensionally stabilized mask supportingframe 32. The reference registration members 230, 232 and 234 includeelongated means receiving means such as for example the cone 152, theplanar surface 156 and the vee groove 154 for receiving the alignmentpins 142, 144, and 146 of the prealigned registration members 130, 132,and 134, respectively.

In the preferred embodiment, a predetermined relationship exists betweenthe reference registration members 230, 232 and 234 and the prealignedregistration members 130, 132 and 134. Specifically, the cone 152 isadapted to cooperate with elongated member 148, vee groove 154 isadapted to cooperate with elongated member 150 and the planar surface156 is adapted to cooperate with the elongated member 149.

In FIGS. 15 and 16, the substrate 80 is held fixed in position over araised central hub 214 by edge clamping members 220, 222 and 224.

The reference registration members and the prealigned registrationmembers cooperate with each other in order to accurately register thesubtrate 80 to the mask 40 which is rigidly fixed to the dimensionallystabilized mask supporting frame 32 illustrated in FIG. 2.

FIG. 16 shows in detail the method for mounting the referenceregistration members 230, 232, and 234 on the substrate holding means210. Specifically, the reference registration member 230 is secured bymeans of a threaded end 254 through a washer 256 and a nut 262.Likewise, reference registration member 232 is affixed to the substrateholding means 210 through a threaded end 258, washer 260 and nut 264.Reference registration member 234 is rigidly affixed to the substrateholding means 210 through threaded end 250, washer 252 and nut 253.

FIG. 17 shows in detail the construction of the substrate holding means210 (in an inverted position) having the portion thereof supporting thesubstrate 80 directly over the raised central hub 214.

In FIG. 17, the cone 152 is held rigidly against the substrate holdingmeans 210 by means of a fastening member which terminates in a threadedend 254 which is held in position by a washer 256 and a nut 262.

Likewise, the vee groove 154 is held in position by a fastener whichterminates in a threaded end 258 which is held in position by a washer260 and a nut 264.

FIGS. 18, 19 and 20 show in greater detail the relationship between theprealigned registration means and the reference registration means whenthe same are loaded against each other enabling the elongated means toco-act interdependently with the elongated means receiving means torestrain lineal and rotational movements between the first member and asecond member without redundancy of constraint in any of the six degreesof freedom to accurately register a first member relative to a secondmember.

Specifically, the alignment pins 142, 146, and 144 are adapted to engageand be received by the cone 152, vee groove 154 and planar surface 156,respectively. Vee groove 154 and the planar surface 156 have shields 270and 272 positioned therearound, respectively. The cone 152 defines aconical shaped surface which is adapted to receive and seat thealignment pin 142. Likewise, vee groove 154 defines a groove-shapedinner surface which is adapted to receive and cooperate with thealignment pin 146. The planar surface 156 defines a flat surface segmentwhich is adapted to cooperate with the alignment pin 144. Each of thereference registration means is mounted within the substrate holdingmeans 210 as described in FIGS. 15, 16 and 17. Specifically, the cone152 is affixed by threaded end 254 in position as illustrated in FIG.17. Likewise, vee groove 154 is fastened to the substrate holding means210 by threaded end 258 and planar surface 156 is affixed to thesubstrate holding means 210 by means of a threaded end 250.

FIGS. 21, 22, 23 and 24 define the apparatus and method for accuratelyregistering a first member in an interdependent operative relationshipto second member.

FIG. 21 illustrates generally that the prealigned registration means130, 132 and 134 are adapted to be operatively coupled to second member.The prealigned registration means includes three elongated membershaving alignment pins, such as for example, alignment pin 142 mounted onprealigned registration means 130, alignment pin 144 mounted onprealigned registration means 132, and alignment pin 146 mounted onprealigned registration means 134. The prealigned registration means130, 132 and 134 including the elongated members which include alignmentpins 142, 144 and 146, respectively, are adapted to be positioned in aspaced relationship to each other and in a predetermined pattern on andextending generally in the same direction from the second member. One ofthe three elongated members which includes alignment pin 142 onprealigned registration means 130, is adapted to be selectively mountedon a second member and have a portion thereof defining a primaryregistration point. In the preferred embodiment, the alignment pins havea portion thereof which is spherical in shape and which is adapted toengage its corresponding reference registration means as will beexplained in further detail hereinafter. In this embodiment, the primaryregistration point is located at the center of the sphere defining thespherical end of alignment pin 146.

A second one of the three elongated means including alignment pin 146mounted on the prealigned registration means 134 wherein the end of thealignment pin 146 defines a secondary registration point which is otherthan the primary registration point defined by the end of the alignmentpin 142. The primary registration point defined by the end of alignmentpin 142 and the secondary registration point defined by the end of pin146 define a line of rotation 284. In this embodiment, the secondaryregistration point is located at the center of the sphere defining thespherical end.

A third of the three elongated members including alignment pin 144mounted on prealigned registration means 132 is adapted to beselectively mounted on the second member and have a portion thereofdefining a tertiary registration point at the end of the alignment pin144 which is located at a point other than on the line of rotation 284defined by the primary registration point and the secondary registrationpoint defined by ends of alignment pins 142 and 146. In this embodiment,the tertiary registration point is located at the point of contactbetween the end of the alignment pin 144 and flat planar surface 156.

Reference registration means 230, 232, and 234 are adapted to beoperatively coupled to the first member which is to be accuratelyregistered in an interdependent relationship to the second member. Thereference registration means include three elongated means which, in thepreferred embodiment, are a cone 152, vee groove 154 and planar surface156. The reference registration means 230, 232 and 234 are adapted to bepositioned and fixedly attached to a first member in substantially thesame predetermined pattern as the prealigned registration means 130, 132and 134 are mounted on the second member.

The sequence in which the prealigned registration means engage thereference registration means is significant in order to minimize theeffects of friction which might otherwise prevent or inhibit co-actingthereof.

When the second member is a deposition mask and the first member is agantry means holding a substrate, which is the preferred embodiment, theengaging and disengaging occurs in a vacuum and often at elevatedtemperatures in a vacuum deposition process. In a vacuum environment andespecially at elevated temperatures the coefficient of friction betweenthe prealigned registration means and the reference registration meanscan be extremely high as is generally known to a person skilled in theart.

Thus, when a first member and second member are moved relative to eachother to permit the prealigned registration means to engage thereference registration means, the use of a proper sequence forengagement therebetween helps insure accurate registration between thefirst member and second member.

FIGS. 22, 23 and 24 will now be utilized to describe that sequence.

First, the first member to be accurately registered to a second memberand the second member are moved toward each other. The second memberincludes a prealigned registration means 130, 132 and 134 located in apredetermined pattern thereon. The prealigned registration means 130,132 and 134 include a selected number of elongated members which includealignment pins 142, 144 and 146 extending outwardly from a selectedsurface of the second member with the axis of each of the elongatedmember 142, 144, and 146 being substantially perpendicular to a selectedplane and wherein one of the elongated members, such as for example,alignment pin 142, is adjustable in two directions within the selectedplane. A second one of the elongated members, such as elongated pin 146,is adjustable in at least one direction other than along a line ofrotation 284 extending through the axis of the first alignment pin 142and in the selected plane. A third one of the elongated members, such asalignment pin 144 is located at a located other than on the line ofrotation 284 in the selected plane.

The first member includes reference registration means 230, 232 and 234fixedly positioned thereon in substantially the same predeterminedpattern as the alignment pins 142, 144 and 146 in position on the secondmember. The reference registration means includes elongated meansreceiving means equal in number to the selected number of elongatedmembers. In the preferred embodiment, there were three elongated members148, 149 and 150. Accordingly, there are three registration means 230,232 and 234.

When the first and second members are moved toward each other, theloading of a predetermined one 148 of the selected number of elongatedmembers, which includes alignment pin 142 against a predetermined one ofthe elongated means receiving means element of the referenceregistration member, such as cone 152, superimposing the primaryregistration point onto a primary reference point which is defined bycone 152. This is illustrated in FIG. 22. At the time of engagement, theother alignment pins 146 and 144 are not in engagement with theircorresponding vee groove 154 and flat planar surface 156, respectively.When the cone 152 is in engagement with the spherical end of alignmentpin 142, a rotatable support is established which fixes lineal movementin all three mutually orthogonal axes between the primary registrationpoint and the primary reference point and which permits rotationalmovement in all three rotational degrees of freedom about the primaryreference point. This is illustrated by arrows shown in FIG. 22 whichdepict the degrees of freedom which are restricted.

FIG. 23 shows the next step of loading a second predetermined one of theselected number of elongated members, such as alignment pin 146 againsta second predetermined one of the elongated members receiving memberssuch as the vee groove 154 wherein the spherical end of alignment pin146 co-acts with groove 154 to superimpose the secondary registrationpoint onto a reference line segment which is defined by the vee grooveestablishing a secondary reference point at the point ofsuperimposition. The secondary alignment pin 146 is positioned relativeto the first alignment pin 142 to define a line of rotation 284 betweenthe primary registration point and the secondary registration point in aselected plane. The line of rotation 284 is shown in FIG. 23 as passingthrough the center of the ends of alignment pins 142 and 146. All linealmovements of the first member relative to the second member are nowfixed. In addition, two of the three rotational degrees of freedom arealso restricted leaving rotation about the line of rotation 284 as theonly permitted degree of freedom remaining for movement between thefirst member and second member.

The co-acting relationship between the vee groove 154 and the sphericalshaped end of alignment pin 146 as described above was based upon theprior co-acting relationship between the cone 152 and the sphericalshaped end of alignment pin 142 restricting all lineal movements and twoof the three rotational degrees of freedom between the first member andthe second member.

However, absent the above prior co-acting relationship between the cone152 and alignment pin 142, the vee groove 154 and alignment pin 146co-act to independently restrict lineal movements of the first memberand the second member at the secondary reference point in a planeperpendicular to the reference line segment defined by vee groove 154and which permits lineal movements of the secondary reference pointalong the reference line segment and which permits rotational movementsin all three rotational degrees of freedom. The restricted direction oflinear movements imposed by the vee groove 154 and alignment pin 146independently co-acting are illustrated by arrows adjacent the veegroove 154.

The results of the combined restrictive effect of the superimposing ofthe primary registration point with the primary reference point and thesecondary registration point with the secondary reference line segmentis to fix all lineal movement and two of the three degrees of rotationalmovement and permit only one degree of rotation between the first memberand second member, that being rotation about the line of rotation 284.

As shown in FIG. 24, the next step of the registration sequence isrotating the first member and second member relative to each otheraround the line of rotation 284 to position a third predetermined one ofthe selected number of elongated members 144 to co-act with the thirdpredetermined one of the selected number of reference registrationmembers which, in the preferred embodiment, is the planar surface 156having the reference plane segment to superimpose the tertiaryregistration point onto the reference plane segment. FIG. 24 shows theangle of rotation 286. As described above, the only remaining degree offreedom between the first member and second member is rotation about theline of rotation 284. Rotation of the first member and second memberaround the line of rotation 284 and towards each other occurs until theend of alignment pin 144 engages the flat planar surface 156superimposing the tertiary registration point onto the reference planesegment defined by the flat planar surface 156 to establish a tertiaryreference point which fixes the last rotational degree of freedom. Whenthis occurs, all six degrees of freedom are then fixed without any onebeing overconstrained.

If the superimposing of the tertiary registration point and tertiaryreference point occurred independently, the effect would to be restrictlineal movement of the first member and second member along an axisperpendicular to the reference plane segment at the point of contactwith the reference plane segment while permitting lineal movements alongthe reference plane segment and rotational movements in all threerotational degrees of freedom about the tertiary reference point. Therestriction of linear movement imposed by the superimposing of thetertiary registration point with the independent reference plane segment156 is depicted by the arrow adjacent the alignment pin 144.

As illustrated in FIGS. 22, 23 and 24, the prealigned registration meansare preadjusted such that repeatable and predetermined accurateregistration and resulting alignment of the first member and secondmember to each other will occur at all times and that the first membercan be repeatably and predeterminedly accurately registered with any oneof a plurality of prealigned different second members.

The method for adjusting the pins to insure this occurs is illustratedin detail with respect to FIGS. 25 and 26.

In FIG. 25, the center line of the eccentric bushing is represented bycenter line 300. The center line of the shank of the elongated member isrepresented by center line 302 and the center line of the alignment pinin a first position is represented by center line 304. The mechanicalconstruction and interelationship between the bushing, shank andalignment pin is depicted in connection with FIGS. 6 through 14,inclusive.

The displacement of the alignment pin in a "Y" direction only can beobtained by rotating the shank such that the attached alignment pincenter line is moved into a different position such as that shown by thecenter line 306.

A method of obtaining "X" displacement of the alignment pin is byrotating the bushing such that the center line of the shank is movedfrom position 302 to position 308 which shifts the center line of thealignment pin from 304 to 312. If desired, a "Y" displacement of thealignment pin after the alignment pin has been moved through, an "X"displacement can be obtained by rotating the shank about center line 308moving the center line of the alignment pin from its location at 312 tothe center line position shown as 314. Thus, the "X" and "Y"displacement of the alignment pin is illustrated in FIG. 25.

In the preferred embodiment, the ability to adjust the alignment pin inan "X" and "Y" direction is utilized in adjusting the alignment pin 142which is adapted to engage the cone 152.

FIGS. 26(a) through 26(c) illustrate three methods for adjusting thealignment pin 142 to obtain either "X", "Y" or "X" and "Y" displacement.FIG. 26(a) illustrates that the center line of the eccentric bushing300, the center line of the shank 302 and the center line of thealignment pin 304 in a starting position. Rotation of the bushing aboutits center line 300 holding the shank 302 in fixed rotationalorientation, results in the center line of the shank moving fromposition 302 to position 308 which shifts the center line of the pinfrom position 304 to 312 giving the desired "X" displacement.

FIG. 26(b) illustrates diagramatically a method for adjusting alignmentpin 142 in order to obtain both "X" and "Y" adjustment. The bushing isrotated about center line 300 which displaces the center line of theshank to position 308. The rotation of the bushing about its center line300 moving the shank to the position illustrated by center line 308shifts the center line of alignment pin 304 to the position illustratedby 312. Then, the shank can be rotated about center line 308 which movesthe center line of the alignment pin from position 312 to position 314.Such rotations provide both an "X" and "Y" displacement of the alignmentpin.

FIG. 26(c) shows a method for obtaining "Y" displacement only of thealignment pin. The "Y" displacement only is obtained by rotating thealignment pin about shank 302 to displace the center line of thealignment pin from position 304 to position 306.

FIGS. 26(d) and 26(e) illustrate a method for adjusting the alignmentpin in a single direction only, such as would be used for alignment pin146 which is adapted to engage vee groove 154. In the preferredembodiment, the alignment pin 146 of the prealigned registration means134 would be adjusted in a single direction preferably perpendicular tothe reference line segment defined by the vee groove 154 in order toprovide alignment at the vee groove 154. The center line of theeccentric bushing 300 is essentially fixed in position and the initialcenter line of the shank is shown by center line 302. In its beginningposition, the center line of the alignment pin is shown as 304. In FIG.26(d), the center lines of the eccentric bushing 300, the shank 302 andalignment pin 304 are in alignment.

In FIG. 26(d), a deflection in a "Y" direction can be obtained byrotating the shank about its center line 302 moving the position of thecenter line of the alignment pin from position 304 to 306. If anadditional displacement of the alignment pin is required in the "Y"direction, the additional displacement is obtained by rotating thebushing about center line 300 maintaining the shank in position whichwould transpose the center line of the shank from 302 to 308. Therotation of the bushing 300 would likewise move the center line of thealignment from position 306 to position 312.

FIG. 26(e) illustrates an alternate method whereby the "Y" displacementcan be precisely controlled, or, if desired, that the center line of thealingment pin can be matched to the center line of the eccentricbushing. The center line of the bushing 300 and the center line of theshank 302 are shown such that the shank is rotated within the eccentricbushing to position the center line of the alignment pin coaxially withthe center line of the eccentric bushing as illustrated by center line304. Rotation of the eccentric bushing about its axis 300 would rotatethe center line of the shank from its position 302 to position 316, andmove the alignment pin center line to position 320. Alternatively, theshank only can be rotated at its center line 302 displacing the centerline of the alignment pin from position 304 to position 306.Alternatively, the bushing can be rotated about its center line 300transposing the center line of the shank to the position illustrated by316. Thereafter, the shank can be rotated placing the center line of thealignment pin in position 318 to obtain the desired "Y" displacement.

FIGS. 26(f) and 26(g) show an alternative method whereby "Y"displacement of the alignment pin, which is offset relative to thecenter line 302 of the shank, can be obtained by rotation of the shankwhich is rotatably mounted within an aperture thereby eliminating theeccentric bushing. The alignment pin can be rotated to any desired "Y"position as illustrated by the center lines of the alignment pinslocated at positions 304, 306 and 322.

FIG. 26(g) illustrates the rotation of the shank about its center line302 to move the alignment pin from its position 304 to position 306which is a displacement in the "Y" direction. The movement of thealignment pin 146 which is shown in FIGS. 21 to 24, results in arotational shift "θ" of the line of rotation 284 about the primaryregistration point located in the end of alignment pin 142. Thedisplacement of the alignment pin 146 results in the spherical end ofthe alignment pin 146 being physically moved relative to the depositionmask and thereby physically shifts the line of rotation 284 relative tothe deposition mask and flange supporting the same.

FIG. 26(g) is based upon the assumption that the first elongated member,which in the preferred embodiment would incorporate alignment pin 142,is adjusted to its appropriate "X" and "Y" position using the techniquesof FIGS. 26(a), 26(b) or 26(c). After it is set in position, the secondalignment member, which in the preferred embodiment, would be alignmentpin 146, needs to be adjusted only in the "Y" direction to accomodatethe vee groove 154 to produce a rotation about the cone 152 andalignment pin 142 of the second member relative to the first member.

In FIGS. 25 and 26, the descriptions thereof were based upon thecriteria that rotation of the eccentric bushing did not produce acorresponding rotation of the elongated member. In certainconfigurations other than those described in FIGS. 6 and 7, rotation ofthe eccentric bushing might produce a corresponding rotation of theelongated member if the elongated member is not clamped or held so as toprevent rotational movement thereof with rotation of the eccentricbushing. In the case where rotation of the eccentric bushing wouldrotate the eccentric bushing and the elongated member as an integralassembly, the offset of the elongated member and the bushing as shown inFIGS. 12, 25 and 26, would not produce the relatively independent "X"and "Y" adjustment from the separate adjustment of each member as shownin FIGS. 25 and 26.

FIG. 27 shows another embodiment of an eccentric bushing and anelongated member wherein the offset of the aperture of the eccentricbushing is positioned relative to the bushing center line such that itis adapted to receive the shank of the elongated member and to positionthe center line of the shank 45° off of the center line of the eccentricbushing relative to the "X" and "Y" adjustment directions. In FIG. 27,the offset of the alignment pin in the elongated member is illustratedto be in a "Y" direction and below the center line of the shank.

In the embodiment of FIG. 27, the combination of the eccentric bushing334 having the elongated member 338 rotatably mounted therein isfabricated such that rotation of the eccentric bushing 334 will rotatethe elongated member 338 including its collar 330. With the constructionillustrated in FIG. 27, rotation of the shank 336 only produces amovement of the alignment pin 340 in the "X" direction. Similarly, arotation of the eccentric bushing 334 and the elongated member 338, asan integral assembly, produces a movement of the alignment pin 340 inthe "Y" direction thereby producing relative independent "X" and "Y"adjustments from the two separate rotational movements as describedherein.

If desired, additional plots of the degrees of adjustment availableusing the embodiment of FIG. 27 would likewise produce the adjustmentvariation which are described above in connection with FIGS. 26(a) to26(g), inclusive.

As noted hereinabove, in the preferred embodiment, the second member isa dimensionally stabilized deposition mask having the prealignedregistration members positioned thereon which are adapted to receive andcooperate with reference registration members which are attached to agantry means which includes a substrate holding means for positioning asubstrate in accurate alignment with the deposition mask. Since thepreferred embodiment utilizes the teachings of this invention in a vapordeposition application where frictions are abnormally high, calculationswere conducted to determine the optimum vee groove angles for a range ofselected cone angles and the maximum allowable friction coefficientbased upon the specific resulting combination of angles for the cone andvee groove wherein the alignment pins are in contact with theirassociated cones, vee grooves and planar surfaces but one of more of thesame are out of the final engagement position which would occur when thedesired registration is obtained. Set forth hereinbelow is a chart whichshows the selected half angle of the cone, the resulting optimum halfangle of a vee groove to cooperate with that cone and a maximumallowable friction coefficient associated with those angles to insurethat registration will occur.

    ______________________________________                                                  Optimum                                                             Cone      Vee Groove Angle                                                                            Maximum Allowable                                     (Half Angle)                                                                            (Half Angle)  Friction Coefficient                                  ______________________________________                                        20°                                                                              42.5°  0.44                                                  25°                                                                              47.4°  0.39                                                  30°                                                                              51.4°  0.35                                                  35°                                                                              54.5°  0.32                                                  40°                                                                              58.7°  0.28                                                  45°                                                                              62.0°  0.25                                                  ______________________________________                                    

As noted above, a half angle of the cone was varied from 20° to 45°which equals a total included cone angle of 40° to 90°. The half coneangle selected for practicing the invention was 30°.

Likewise, the resulting optimum angle of the vee groove ranged from ahalf angle of 42.5° to a half angle of 62.0° with the resultant veegroove half angle being 51.4° based upon the selected half angle of thecone being 30°. The maximum allowable friction coefficients resultingfrom the range of calculated angles covers the range of 0.44 wherein thecone half angle is approximately 20° and the vee groove half angle isapproximately 42.5° to a maximum allowable friction coefficient of 0.25wherein the cone half angle is 45° and a optimum vee groove half angleis 62.0°.

In the preferred embodiment, the cone half angle was selected to be a30° or a total included angle for the cone of 60° and the optimum veegroove half angle was selected to be 51.4° or a total included angle ofthe vee groove of 102.8°.

In one embodiment of the invention, apparatus used in a vacuumdeposition process utilized a cone having a half angle of 30° and a veegroove having a half angle of 45°. Although the optimum half angle ofthe vee groove is 51.5° for the cone half angle of 30° is preferred,fabrication of the vee groove at a half angle of a standard 45° was moreeconomical than fabricating the vee groove at the optimum half angle of51.4°.

During the registration sequence, as described in connection with FIGS.22 to 24, the cone and its associated alignment pin initially contactand a sliding action of the pin along the cone would occur until thealignment pin is seated within the cone shaped surface as illustrated inFIG. 20.

At the time that the spherical end of the alignment pin 142 slidesrelative to the cone 152, the friction which exists between thealignment pin and the cone will retard the sliding action therebetween.If the friction coefficient is sufficiently high to completely retardthe sliding action, the alignment pin and cone will not slide relativeto each other and misregistration will occur. If the sequence utilizedin attempting to obtain accurate registration results in either one orboth of the vee groove and the flat surface contacting or engaging theirrespective alignment pins prior to the full engagement of the alignmentpin 142 relative of the cone 152, the sliding action which is requiredbetween the alignment pin and the cone relative to each other must alsoimpart relative movement and sliding action between the vee groove andits associated pin and/or the flat surface and its associated pin. Insuch event, any friction which exists between the vee groove and itsassociated pin and/or the planar surface and its associated pin wouldadditionally retard the sliding action of the alignment pin in the cone.Thus, if the sum of the friction which must be overcome in order toprovide relative movement between the alignment pin and the conetogether with the sum of the friction which must be overcome to causerelative movement between the vee groove and its associated pin and/orthe planar surface and its associated pin is too high, relative movementwill not occur between any of the alignment pins and their associatedcone, vee groove or flat which would result in misregistration. Inoperation, if a registration sequence is utilized wherein any one orboth of the vee groove or planar surface is placed in initial contactwith its associated alignment pin before full engagement is made betweenthe alignment pin 142 and the cone 152, the maximum resultantcoefficient of friction which can exist in order to allow relativemovement between each of the alignment pins and its associated cone, veegroove and flat surface must be lower, in the aggregrate, then themagnitude of the coefficient of friction that any one individualreference registration member may have to achieve registration of thealignment pins to its appropriate reference registration member in orderto achieve the registration between each of the alignment pins and itsassociated cone, vee groove and planar surface when considered as anindependent alignment operation or when using the preferred engagementsequence. The coefficients of friction which are required to meet thiscriteria and result in registration wherein sequences other than in thepreferred sequence are used, are such low values that the same may notbe achievable in a vacuum without resorting to exotic or impracticalmaterials such as diamond or sapphire.

Referring again to the preferred registration reference and after thealignment pin 142 is in full engagement with the cone 152, the nextdesired step of the sequence is to place the alignment pin 146 ininitial contact with vee groove 154 and to have relative slidingmovement occur therebetween to place the alignment pin 146 in fullengagement with vee groove 154 as shown in FIG. 19 which is required foraccurate registration.

In using the preferred registration sequence, the half angles of the veegroove and cone are selected to be sufficiently small to insure that thesliding actions will occur, overriding the friction to obtain thedesired accurate registration between the alignment pins 142 and 146,cone 152 and vee groove 154.

Conversely, if the second step of the sequence utilized an initialcontact between the alignment pin 144 and the planar surface 156, nosliding action would occur between the contact point on the end of thealignment pin 144 and the planar surface 156. The next step of thesequence would require that the alignment pin 146 engage the vee groove154. In such event, the initial contact between the end of alignment pin146 and vee groove 154 would probably be principally along one of thetwo sides defining the vee groove 154. In order to obtain the requiredfinal engagement of the alignment pin 146 in the vee groove 154 as shownin FIG. 19, and the overall engagement of all of the alignment pins asshown in FIG. 24, sliding action must occur between the spherical end ofthe alignment pin 146 and the vee groove 154. The sliding action willoccur only if the angle of the vee groove 154 is sufficiently steep tooverride the combination of the frictional force developed between thespherical end of the alignment pin 146 and the surface of the sidedefining the vee groove 154 plus the frictional force developed by thecontact point of the alignment pin 144 sliding relative to planarsurface 156.

Another feature of the cone 152, vee groove 154 and planar surface 156construction is that when the first member and second member are exposedto an environment having high temperature, which are typicallyencountered in a vacuum deposition process, either or both members mayexperience thermal expansion and contraction which are compensated bythe vee groove 154 and planar surface 156 points of engagement beingunconstrained to permit the expansion and contraction to occur whilemaintaining an accurate and unique registration between the members.

In the preferred sequence, the drag action on the registering ofalignment pin 146 into the vee groove 154 produced by alignment pin 142rotating in cone 152 as alignment pin 146 slides on the vee groove willbe a very small moment which will represent an insignificant drag on theregistering process. The insignificant magnitude of this drag resultsfrom the very small radius of the contact circle of the spherical end ofalignment pin 142 in the cone 152 as compared to the distance betweenalignment pins 142 and 146. Likewise, a similar insignificant drag dueto the pivoting of alignment pins 142 and 146 in the cone 152 and veegroove 154, respectively, will occur as the first member and secondmember pivot relative to each other about the line of rotation 284 asalignment pin 144 is being engaged with the flat planar surface 156, asillustrated in FIG. 24.

Thus, is is apparent that the optimum angle relationship between the veegroove and cone as described hereinabove will help to insure accurateregistration independent of the registration sequence. If the preferredregistration sequence is used as described in connection with FIGS. 22to 24, the angles of the vee groove and cone may be different because ofthe reduced friction/drag interactions which are eliminated by thealignment pin and reference registration member contacting sequence.

If the teachings of this invention are utilized in an ambient atmosphereand the coefficient of frictions do not become a major problem as theydo in a vacuum, the sequence may then not be as significant in that anadequately low coefficient of friction can usually be achieved atambient temperatures depending on the application.

Also, it is envisioned that certain applications may be available wherethe surfaces of both the alignment pins and the reference registrationmembers can be provided with a lubricant such that the coefficient offriction is at a very low level and that the sequence of the loadingneed not be followed to overcome the coefficient of friction problemwhich would otherwise be present.

It is envisioned that the teachings of the invention could have a widerange of applications such as in a mask substrate alignment apparatusused in a vacuum deposition system, sputtering system or the like. Insystems where the alignment must occur in a vacuum, the loading sequenceis one method of overcoming the adverse effects which friction imposesupon members contacting and sliding relative to each other in a vacuum.

It is also envisioned that the teachings of this invention could beutilized in a number of applications such as for example, in machiningprecise parts, and aligning a first member relative to a second memberor possibly even in the dental articulation art.

What is claimed is:
 1. Apparatus for accurately registering a referencemember in interdependent loading relationship at a predetermined spacingand position relative to one of a plurality of moveable memberscomprisingmeans for supporting a plurality of moveable members each ofwhich has a selected number of prealigned registration members which arelocated therein in a predetermined pattern, and with axes thereofsubstantially perpendicular to a selected plane, said supporting meansbeing adapted to transport each of said moveable members including itsassociated prealigned registration members along a predetermined path toa working station; means for supporting a reference member at a saidworking station in spaced opposed relationship to a said moveable memberlocated at a said working station with said prealigned registrationmembers thereof positioned towards said reference member supportingmeans; and reference registration members, equal in number to theselected number of prealigned registration members, located on at leastone of said reference member supporting means and a reference member andpositioned thereon in substantially said predetermined pattern and whichare adapted to co-act with said prealigned registration members whenloaded thereagainst and being adapted to accurately register thereference member supporting means including a said reference member at apredetermined spacing and position relative to said moveable memberlocated at said working station.
 2. The Apparatus of claim 1 whereinsaid selected number of prealigned registration members comprisethreeprealigned registration members operatively coupled to each of saidmoveable members, said three prealigned registration members eachincluding an elongated member positioned in said predetermined patternon and extending from said moveable member with the axis of each of saidelongated members extending from said moveable member and substantiallyperpendicular to said selected plane, one of said elongated membersbeing adapted to be mounted on a said moveable member with the one ofsaid elongated members axis positioned to intersect said selected planeat a point within said selected plane to define a primary registrationpoint, one of said two other elongated members being adapted to bemounted on a said moveable member with said one of said two otherelongated members axis positioned to intersect said selected plane at apoint other than at said primary reference point to define a secondaryreference point, said primary reference point and said secondaryreference point defining a line located within said selected plane, theother of said two elongated members being adapted to be fixedly mountedon a said moveable member with the said other of said two elongatedmembers axis intersecting said selected plane at a fixed point locatedat a point other than on said line to define a tertiary reference point,said tertiary reference point and said line defining a plane which iscoplanar with said selected plane; and wherein said equal number ofreference registration members comprise three reference registrationmembers operatively coupled to at least one of said reference membersupporting means and a said reference member which it to be accuratelyregistered in an operative relationship to a said moveable member, eachof said reference registration members including an elongated memberreceiving member adapted to be positioned thereon and fixedly affixedthereto in substantially said predetermined pattern; each of saidreference registration members being adapted to receive said prealignedregistration member when a said reference member and a said moveablemember are loaded against each other enabling the elongated memberreceiving member to co-act with said elongated member to accuratelyregister a said reference member at a predetermined spacing and positionrelative to a said moveable member.
 3. The apparatus of claim 2 whereineach of said elongated members has a preselected axial length and eachof the elongated receiving members has a preselected depth of engagementwith its associated elongated member which co-acts therewith toestablish a predetermined spacing and position when a said referencemember is accurately registered in an interdependent relationship tosaid moveable member.
 4. The apparatus of claim 3 wherein at least oneof the elongated members' preselected axial length is established by useof at least one shim having a known axial thickness.
 5. The apparatus ofclaim 2 wherein said reference member is a substrate and said moveablemembers are deposition masks having deposition patterns formed therein.